8/17/2012	11:35:06 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/17/2012	11:35:07 AM	Recipe started at 11:35 AM
8/17/2012	11:35:07 AM	Helium valve closed
8/17/2012	11:35:07 AM	H2 valve closed
8/17/2012	11:35:07 AM	BCl3 valve closed
8/17/2012	11:35:07 AM	PH3 valve closed
8/17/2012	11:35:07 AM	SiCl4 pre valve closed
8/17/2012	11:35:07 AM	SiCl4 post valve closed
8/17/2012	11:35:07 AM	Main Vac valve closed
8/17/2012	11:35:07 AM	Bypass valve closed
8/17/2012	11:35:07 AM	Bubbler valve closed
8/17/2012	11:35:07 AM	Helium MFC set to  0.000000
8/17/2012	11:35:07 AM	H2 MFC set to  0.000000
8/17/2012	11:35:07 AM	BCl3 MFC set to  0.000000
8/17/2012	11:35:07 AM	PH3 MFC set to  0.000000
8/17/2012	11:35:07 AM	SiCl4 MFC set to  0.000000
8/17/2012	11:35:07 AM	Bypass solenoid MFC set to  0.000000
8/17/2012	11:35:07 AM	Tube furnace set to 0
8/17/2012	11:35:10 AM	H2 valve closed
8/17/2012	11:35:10 AM	BCl3 valve closed
8/17/2012	11:35:10 AM	PH3 valve closed
8/17/2012	11:35:10 AM	SiCl4 pre valve closed
8/17/2012	11:35:10 AM	SiCl4 post valve closed
8/17/2012	11:35:10 AM	Main Vac valve closed
8/17/2012	11:35:10 AM	Bypass valve closed
8/17/2012	11:35:10 AM	Bubbler valve closed
8/17/2012	11:35:10 AM	Helium valve opened
8/17/2012	11:35:10 AM	Helium MFC set to  500.000000
8/17/2012	11:35:10 AM	H2 MFC set to  0.000000
8/17/2012	11:35:10 AM	BCl3 MFC set to  0.000000
8/17/2012	11:35:10 AM	PH3 MFC set to  0.000000
8/17/2012	11:35:10 AM	SiCl4 MFC set to  0.000000
8/17/2012	11:35:10 AM	Bypass solenoid MFC set to  0.000000
8/17/2012	11:35:10 AM	Tube furnace set to 0
8/17/2012	11:36:23 AM	Helium valve closed
8/17/2012	11:36:23 AM	H2 valve closed
8/17/2012	11:36:23 AM	BCl3 valve closed
8/17/2012	11:36:23 AM	PH3 valve closed
8/17/2012	11:36:23 AM	SiCl4 pre valve closed
8/17/2012	11:36:23 AM	SiCl4 post valve closed
8/17/2012	11:36:23 AM	Main Vac valve closed
8/17/2012	11:36:23 AM	Bypass valve closed
8/17/2012	11:36:23 AM	Bubbler valve closed
8/17/2012	11:36:23 AM	Helium MFC set to  0.000000
8/17/2012	11:36:23 AM	H2 MFC set to  0.000000
8/17/2012	11:36:23 AM	BCl3 MFC set to  0.000000
8/17/2012	11:36:23 AM	PH3 MFC set to  0.000000
8/17/2012	11:36:23 AM	SiCl4 MFC set to  0.000000
8/17/2012	11:36:23 AM	Bypass solenoid MFC set to  0.000000
8/17/2012	11:36:23 AM	Tube furnace set to 0
8/17/2012	11:36:24 AM	Run finished at 11:36 AM
8/17/2012	11:36:24 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/17/2012	11:39:56 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/17/2012	11:39:57 AM	Recipe started at 11:39 AM
8/17/2012	11:39:57 AM	Helium valve closed
8/17/2012	11:39:57 AM	H2 valve closed
8/17/2012	11:39:57 AM	BCl3 valve closed
8/17/2012	11:39:57 AM	PH3 valve closed
8/17/2012	11:39:57 AM	SiCl4 pre valve closed
8/17/2012	11:39:57 AM	SiCl4 post valve closed
8/17/2012	11:39:57 AM	Main Vac valve closed
8/17/2012	11:39:57 AM	Bubbler valve closed
8/17/2012	11:39:57 AM	Bypass valve opened
8/17/2012	11:39:57 AM	Helium MFC set to  0.000000
8/17/2012	11:39:57 AM	H2 MFC set to  0.000000
8/17/2012	11:39:57 AM	BCl3 MFC set to  0.000000
8/17/2012	11:39:57 AM	PH3 MFC set to  0.000000
8/17/2012	11:39:57 AM	SiCl4 MFC set to  0.000000
8/17/2012	11:39:57 AM	Bypass solenoid MFC set to  0.000000
8/17/2012	11:39:57 AM	Tube furnace set to 0
8/17/2012	11:41:21 AM	Helium valve closed
8/17/2012	11:41:21 AM	H2 valve closed
8/17/2012	11:41:21 AM	BCl3 valve closed
8/17/2012	11:41:21 AM	PH3 valve closed
8/17/2012	11:41:21 AM	SiCl4 pre valve closed
8/17/2012	11:41:21 AM	SiCl4 post valve closed
8/17/2012	11:41:21 AM	Main Vac valve closed
8/17/2012	11:41:21 AM	Bubbler valve closed
8/17/2012	11:41:21 AM	Bypass valve opened
8/17/2012	11:41:21 AM	Helium MFC set to  0.000000
8/17/2012	11:41:21 AM	H2 MFC set to  0.000000
8/17/2012	11:41:21 AM	BCl3 MFC set to  0.000000
8/17/2012	11:41:21 AM	PH3 MFC set to  0.000000
8/17/2012	11:41:21 AM	SiCl4 MFC set to  0.000000
8/17/2012	11:41:21 AM	Bypass solenoid MFC set to  0.000000
8/17/2012	11:41:21 AM	Tube furnace set to 0
8/17/2012	11:42:21 AM	Helium valve closed
8/17/2012	11:42:21 AM	H2 valve closed
8/17/2012	11:42:21 AM	BCl3 valve closed
8/17/2012	11:42:22 AM	PH3 valve closed
8/17/2012	11:42:22 AM	SiCl4 pre valve closed
8/17/2012	11:42:22 AM	SiCl4 post valve closed
8/17/2012	11:42:22 AM	Bypass valve closed
8/17/2012	11:42:22 AM	Bubbler valve closed
8/17/2012	11:42:22 AM	Main Vac valve opened
8/17/2012	11:42:22 AM	Helium MFC set to  0.000000
8/17/2012	11:42:22 AM	H2 MFC set to  0.000000
8/17/2012	11:42:22 AM	BCl3 MFC set to  0.000000
8/17/2012	11:42:22 AM	PH3 MFC set to  0.000000
8/17/2012	11:42:22 AM	SiCl4 MFC set to  0.000000
8/17/2012	11:42:22 AM	Bypass solenoid MFC set to  0.000000
8/17/2012	11:42:22 AM	Tube furnace set to 0
8/17/2012	11:42:23 AM	Run finished at 11:42 AM
8/17/2012	11:42:23 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/17/2012	1:07:40 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
8/17/2012	1:07:41 PM	Recipe started at 1:07 PM
8/17/2012	1:07:41 PM	Helium valve closed
8/17/2012	1:07:41 PM	H2 valve closed
8/17/2012	1:07:41 PM	BCl3 valve closed
8/17/2012	1:07:41 PM	PH3 valve closed
8/17/2012	1:07:41 PM	SiCl4 pre valve closed
8/17/2012	1:07:41 PM	SiCl4 post valve closed
8/17/2012	1:07:41 PM	Main Vac valve closed
8/17/2012	1:07:41 PM	Bypass valve closed
8/17/2012	1:07:41 PM	Bubbler valve closed
8/17/2012	1:07:41 PM	Helium MFC set to  0.000000
8/17/2012	1:07:41 PM	H2 MFC set to  0.000000
8/17/2012	1:07:41 PM	BCl3 MFC set to  0.000000
8/17/2012	1:07:41 PM	PH3 MFC set to  0.000000
8/17/2012	1:07:41 PM	SiCl4 MFC set to  0.000000
8/17/2012	1:07:41 PM	Bypass solenoid MFC set to  0.000000
8/17/2012	1:07:41 PM	Tube furnace set to 0
8/17/2012	1:07:41 PM	Run finished at 1:07 PM
8/17/2012	1:07:41 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
8/17/2012	1:08:00 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/17/2012	1:08:00 PM	Recipe started at 1:08 PM
8/17/2012	1:08:00 PM	Helium valve closed
8/17/2012	1:08:00 PM	H2 valve closed
8/17/2012	1:08:01 PM	BCl3 valve closed
8/17/2012	1:08:01 PM	PH3 valve closed
8/17/2012	1:08:01 PM	SiCl4 pre valve closed
8/17/2012	1:08:01 PM	SiCl4 post valve closed
8/17/2012	1:08:01 PM	Main Vac valve closed
8/17/2012	1:08:01 PM	Bubbler valve closed
8/17/2012	1:08:01 PM	Bypass valve opened
8/17/2012	1:08:01 PM	Helium MFC set to  0.000000
8/17/2012	1:08:01 PM	H2 MFC set to  0.000000
8/17/2012	1:08:01 PM	BCl3 MFC set to  0.000000
8/17/2012	1:08:01 PM	PH3 MFC set to  0.000000
8/17/2012	1:08:01 PM	SiCl4 MFC set to  0.000000
8/17/2012	1:08:01 PM	Bypass solenoid MFC set to  0.000000
8/17/2012	1:08:01 PM	Tube furnace set to 0
8/17/2012	1:08:01 PM	Helium valve closed
8/17/2012	1:08:01 PM	H2 valve closed
8/17/2012	1:08:01 PM	BCl3 valve closed
8/17/2012	1:08:01 PM	PH3 valve closed
8/17/2012	1:08:01 PM	SiCl4 pre valve closed
8/17/2012	1:08:01 PM	SiCl4 post valve closed
8/17/2012	1:08:01 PM	Main Vac valve closed
8/17/2012	1:08:01 PM	Bubbler valve closed
8/17/2012	1:08:01 PM	Bypass valve opened
8/17/2012	1:08:01 PM	Helium MFC set to  0.000000
8/17/2012	1:08:01 PM	H2 MFC set to  0.000000
8/17/2012	1:08:01 PM	BCl3 MFC set to  0.000000
8/17/2012	1:08:01 PM	PH3 MFC set to  0.000000
8/17/2012	1:08:01 PM	SiCl4 MFC set to  0.000000
8/17/2012	1:08:01 PM	Bypass solenoid MFC set to  0.000000
8/17/2012	1:08:01 PM	Tube furnace set to 0
8/17/2012	1:08:01 PM	Helium valve closed
8/17/2012	1:08:01 PM	H2 valve closed
8/17/2012	1:08:01 PM	BCl3 valve closed
8/17/2012	1:08:01 PM	PH3 valve closed
8/17/2012	1:08:01 PM	SiCl4 pre valve closed
8/17/2012	1:08:01 PM	SiCl4 post valve closed
8/17/2012	1:08:01 PM	Bypass valve closed
8/17/2012	1:08:01 PM	Bubbler valve closed
8/17/2012	1:08:01 PM	Main Vac valve opened
8/17/2012	1:08:01 PM	Helium MFC set to  0.000000
8/17/2012	1:08:02 PM	H2 MFC set to  0.000000
8/17/2012	1:08:02 PM	BCl3 MFC set to  0.000000
8/17/2012	1:08:02 PM	PH3 MFC set to  0.000000
8/17/2012	1:08:02 PM	SiCl4 MFC set to  0.000000
8/17/2012	1:08:02 PM	Bypass solenoid MFC set to  0.000000
8/17/2012	1:08:02 PM	Tube furnace set to 0
8/17/2012	1:08:03 PM	Run finished at 1:08 PM
8/17/2012	1:08:03 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/17/2012	1:08:39 PM	Recipe started at 1:08 PM
8/17/2012	1:08:39 PM	Helium valve closed
8/17/2012	1:08:39 PM	H2 valve closed
8/17/2012	1:08:39 PM	BCl3 valve closed
8/17/2012	1:08:39 PM	PH3 valve closed
8/17/2012	1:08:39 PM	SiCl4 pre valve closed
8/17/2012	1:08:39 PM	SiCl4 post valve closed
8/17/2012	1:08:39 PM	Main Vac valve closed
8/17/2012	1:08:39 PM	Bypass valve closed
8/17/2012	1:08:39 PM	Bubbler valve closed
8/17/2012	1:08:39 PM	Helium MFC set to  0.000000
8/17/2012	1:08:39 PM	H2 MFC set to  0.000000
8/17/2012	1:08:39 PM	BCl3 MFC set to  0.000000
8/17/2012	1:08:39 PM	PH3 MFC set to  0.000000
8/17/2012	1:08:39 PM	SiCl4 MFC set to  0.000000
8/17/2012	1:08:39 PM	Bypass solenoid MFC set to  0.000000
8/17/2012	1:08:39 PM	Tube furnace set to 0
8/17/2012	1:08:42 PM	Helium valve closed
8/17/2012	1:08:42 PM	BCl3 valve closed
8/17/2012	1:08:42 PM	PH3 valve closed
8/17/2012	1:08:42 PM	SiCl4 pre valve closed
8/17/2012	1:08:42 PM	SiCl4 post valve closed
8/17/2012	1:08:42 PM	Main Vac valve closed
8/17/2012	1:08:42 PM	Bypass valve closed
8/17/2012	1:08:42 PM	Bubbler valve closed
8/17/2012	1:08:42 PM	H2 valve opened
8/17/2012	1:08:42 PM	Helium MFC set to  0.000000
8/17/2012	1:08:42 PM	H2 MFC set to  500.000000
8/17/2012	1:08:42 PM	BCl3 MFC set to  0.000000
8/17/2012	1:08:42 PM	PH3 MFC set to  0.000000
8/17/2012	1:08:42 PM	SiCl4 MFC set to  0.000000
8/17/2012	1:08:42 PM	Bypass solenoid MFC set to  0.000000
8/17/2012	1:08:42 PM	Tube furnace set to 50
8/17/2012	1:09:58 PM	Helium valve closed
8/17/2012	1:09:58 PM	BCl3 valve closed
8/17/2012	1:09:58 PM	PH3 valve closed
8/17/2012	1:09:58 PM	SiCl4 pre valve closed
8/17/2012	1:09:58 PM	SiCl4 post valve closed
8/17/2012	1:09:58 PM	Main Vac valve closed
8/17/2012	1:09:58 PM	Bypass valve closed
8/17/2012	1:09:58 PM	H2 valve opened
8/17/2012	1:09:58 PM	Bubbler valve opened
8/17/2012	1:09:58 PM	Helium MFC set to  0.000000
8/17/2012	1:09:58 PM	H2 MFC set to  500.000000
8/17/2012	1:09:58 PM	BCl3 MFC set to  0.000000
8/17/2012	1:09:58 PM	PH3 MFC set to  0.000000
8/17/2012	1:09:58 PM	SiCl4 MFC set to  0.000000
8/17/2012	1:09:58 PM	Bypass solenoid MFC set to  0.000000
8/17/2012	1:09:58 PM	Tube furnace set to 50
8/17/2012	1:09:59 PM	Helium valve closed
8/17/2012	1:09:59 PM	BCl3 valve closed
8/17/2012	1:09:59 PM	PH3 valve closed
8/17/2012	1:09:59 PM	SiCl4 pre valve closed
8/17/2012	1:09:59 PM	SiCl4 post valve closed
8/17/2012	1:09:59 PM	Main Vac valve closed
8/17/2012	1:09:59 PM	Bypass valve closed
8/17/2012	1:09:59 PM	H2 valve opened
8/17/2012	1:09:59 PM	Bubbler valve opened
8/17/2012	1:09:59 PM	Helium MFC set to  0.000000
8/17/2012	1:09:59 PM	H2 MFC set to  500.000000
8/17/2012	1:09:59 PM	BCl3 MFC set to  0.000000
8/17/2012	1:09:59 PM	PH3 MFC set to  0.000000
8/17/2012	1:09:59 PM	SiCl4 MFC set to  0.000000
8/17/2012	1:09:59 PM	Bypass solenoid MFC set to  0.000000
8/17/2012	1:09:59 PM	Tube furnace set to 1000
8/17/2012	1:29:59 PM	Helium valve closed
8/17/2012	1:29:59 PM	PH3 valve closed
8/17/2012	1:29:59 PM	Main Vac valve closed
8/17/2012	1:29:59 PM	Bypass valve closed
8/17/2012	1:29:59 PM	H2 valve opened
8/17/2012	1:29:59 PM	BCl3 valve opened
8/17/2012	1:29:59 PM	SiCl4 pre valve opened
8/17/2012	1:29:59 PM	SiCl4 post valve opened
8/17/2012	1:29:59 PM	Bubbler valve opened
8/17/2012	1:29:59 PM	Helium MFC set to  0.000000
8/17/2012	1:29:59 PM	H2 MFC set to  500.000000
8/17/2012	1:29:59 PM	BCl3 MFC set to  1.000000
8/17/2012	1:29:59 PM	PH3 MFC set to  0.000000
8/17/2012	1:29:59 PM	SiCl4 MFC set to  50.000000
8/17/2012	1:29:59 PM	Bypass solenoid MFC set to  0.000000
8/17/2012	1:29:59 PM	Tube furnace set to 1000
8/17/2012	1:50:00 PM	Helium valve closed
8/17/2012	1:50:00 PM	BCl3 valve closed
8/17/2012	1:50:00 PM	PH3 valve closed
8/17/2012	1:50:00 PM	SiCl4 pre valve closed
8/17/2012	1:50:00 PM	SiCl4 post valve closed
8/17/2012	1:50:00 PM	Main Vac valve closed
8/17/2012	1:50:00 PM	Bypass valve closed
8/17/2012	1:50:00 PM	H2 valve opened
8/17/2012	1:50:00 PM	Bubbler valve opened
8/17/2012	1:50:00 PM	Helium MFC set to  0.000000
8/17/2012	1:50:00 PM	H2 MFC set to  500.000000
8/17/2012	1:50:00 PM	BCl3 MFC set to  0.000000
8/17/2012	1:50:00 PM	PH3 MFC set to  0.000000
8/17/2012	1:50:00 PM	SiCl4 MFC set to  0.000000
8/17/2012	1:50:00 PM	Bypass solenoid MFC set to  0.000000
8/17/2012	1:50:00 PM	Tube furnace set to 950
8/17/2012	1:53:00 PM	Helium valve closed
8/17/2012	1:53:00 PM	BCl3 valve closed
8/17/2012	1:53:00 PM	PH3 valve closed
8/17/2012	1:53:00 PM	SiCl4 pre valve closed
8/17/2012	1:53:00 PM	SiCl4 post valve closed
8/17/2012	1:53:00 PM	Main Vac valve closed
8/17/2012	1:53:00 PM	Bypass valve closed
8/17/2012	1:53:00 PM	H2 valve opened
8/17/2012	1:53:00 PM	Bubbler valve opened
8/17/2012	1:53:00 PM	Helium MFC set to  0.000000
8/17/2012	1:53:00 PM	H2 MFC set to  500.000000
8/17/2012	1:53:00 PM	BCl3 MFC set to  0.000000
8/17/2012	1:53:00 PM	PH3 MFC set to  0.000000
8/17/2012	1:53:00 PM	SiCl4 MFC set to  0.000000
8/17/2012	1:53:00 PM	Bypass solenoid MFC set to  0.000000
8/17/2012	1:53:00 PM	Tube furnace set to 900
8/17/2012	1:56:00 PM	Helium valve closed
8/17/2012	1:56:00 PM	BCl3 valve closed
8/17/2012	1:56:00 PM	PH3 valve closed
8/17/2012	1:56:00 PM	SiCl4 pre valve closed
8/17/2012	1:56:00 PM	SiCl4 post valve closed
8/17/2012	1:56:00 PM	Main Vac valve closed
8/17/2012	1:56:00 PM	Bypass valve closed
8/17/2012	1:56:00 PM	H2 valve opened
8/17/2012	1:56:00 PM	Bubbler valve opened
8/17/2012	1:56:00 PM	Helium MFC set to  0.000000
8/17/2012	1:56:00 PM	H2 MFC set to  500.000000
8/17/2012	1:56:00 PM	BCl3 MFC set to  0.000000
8/17/2012	1:56:00 PM	PH3 MFC set to  0.000000
8/17/2012	1:56:00 PM	SiCl4 MFC set to  0.000000
8/17/2012	1:56:00 PM	Bypass solenoid MFC set to  0.000000
8/17/2012	1:56:00 PM	Tube furnace set to 850
8/17/2012	1:59:00 PM	Helium valve closed
8/17/2012	1:59:00 PM	BCl3 valve closed
8/17/2012	1:59:00 PM	PH3 valve closed
8/17/2012	1:59:00 PM	SiCl4 pre valve closed
8/17/2012	1:59:00 PM	SiCl4 post valve closed
8/17/2012	1:59:00 PM	Main Vac valve closed
8/17/2012	1:59:00 PM	Bypass valve closed
8/17/2012	1:59:00 PM	H2 valve opened
8/17/2012	1:59:00 PM	Bubbler valve opened
8/17/2012	1:59:00 PM	Helium MFC set to  0.000000
8/17/2012	1:59:00 PM	H2 MFC set to  500.000000
8/17/2012	1:59:00 PM	BCl3 MFC set to  0.000000
8/17/2012	1:59:00 PM	PH3 MFC set to  0.000000
8/17/2012	1:59:00 PM	SiCl4 MFC set to  0.000000
8/17/2012	1:59:00 PM	Bypass solenoid MFC set to  0.000000
8/17/2012	1:59:00 PM	Tube furnace set to 800
8/17/2012	2:02:00 PM	Helium valve closed
8/17/2012	2:02:00 PM	BCl3 valve closed
8/17/2012	2:02:00 PM	PH3 valve closed
8/17/2012	2:02:00 PM	SiCl4 pre valve closed
8/17/2012	2:02:00 PM	SiCl4 post valve closed
8/17/2012	2:02:00 PM	Main Vac valve closed
8/17/2012	2:02:00 PM	Bypass valve closed
8/17/2012	2:02:00 PM	H2 valve opened
8/17/2012	2:02:00 PM	Bubbler valve opened
8/17/2012	2:02:00 PM	Helium MFC set to  0.000000
8/17/2012	2:02:00 PM	H2 MFC set to  500.000000
8/17/2012	2:02:00 PM	BCl3 MFC set to  0.000000
8/17/2012	2:02:00 PM	PH3 MFC set to  0.000000
8/17/2012	2:02:00 PM	SiCl4 MFC set to  0.000000
8/17/2012	2:02:00 PM	Bypass solenoid MFC set to  0.000000
8/17/2012	2:02:00 PM	Tube furnace set to 750
8/17/2012	2:05:01 PM	H2 valve closed
8/17/2012	2:05:01 PM	BCl3 valve closed
8/17/2012	2:05:01 PM	PH3 valve closed
8/17/2012	2:05:01 PM	SiCl4 pre valve closed
8/17/2012	2:05:01 PM	SiCl4 post valve closed
8/17/2012	2:05:01 PM	Main Vac valve closed
8/17/2012	2:05:01 PM	Bypass valve closed
8/17/2012	2:05:01 PM	Helium valve opened
8/17/2012	2:05:01 PM	Bubbler valve opened
8/17/2012	2:05:01 PM	Helium MFC set to  400.000000
8/17/2012	2:05:01 PM	H2 MFC set to  0.000000
8/17/2012	2:05:01 PM	BCl3 MFC set to  0.000000
8/17/2012	2:05:01 PM	PH3 MFC set to  0.000000
8/17/2012	2:05:01 PM	SiCl4 MFC set to  0.000000
8/17/2012	2:05:01 PM	Bypass solenoid MFC set to  0.000000
8/17/2012	2:05:01 PM	Tube furnace set to 0
8/17/2012	2:30:01 PM	Helium valve closed
8/17/2012	2:30:01 PM	H2 valve closed
8/17/2012	2:30:01 PM	BCl3 valve closed
8/17/2012	2:30:01 PM	PH3 valve closed
8/17/2012	2:30:01 PM	SiCl4 pre valve closed
8/17/2012	2:30:01 PM	SiCl4 post valve closed
8/17/2012	2:30:01 PM	Main Vac valve closed
8/17/2012	2:30:01 PM	Bypass valve closed
8/17/2012	2:30:01 PM	Bubbler valve closed
8/17/2012	2:30:01 PM	Helium MFC set to  0.000000
8/17/2012	2:30:01 PM	H2 MFC set to  0.000000
8/17/2012	2:30:01 PM	BCl3 MFC set to  0.000000
8/17/2012	2:30:01 PM	PH3 MFC set to  0.000000
8/17/2012	2:30:01 PM	SiCl4 MFC set to  0.000000
8/17/2012	2:30:01 PM	Bypass solenoid MFC set to  0.000000
8/17/2012	2:30:01 PM	Tube furnace set to 50
8/17/2012	2:35:01 PM	Helium valve closed
8/17/2012	2:35:01 PM	H2 valve closed
8/17/2012	2:35:01 PM	BCl3 valve closed
8/17/2012	2:35:01 PM	PH3 valve closed
8/17/2012	2:35:01 PM	SiCl4 pre valve closed
8/17/2012	2:35:01 PM	SiCl4 post valve closed
8/17/2012	2:35:01 PM	Main Vac valve closed
8/17/2012	2:35:01 PM	Bubbler valve closed
8/17/2012	2:35:01 PM	Bypass valve opened
8/17/2012	2:35:01 PM	Helium MFC set to  0.000000
8/17/2012	2:35:01 PM	H2 MFC set to  0.000000
8/17/2012	2:35:01 PM	BCl3 MFC set to  0.000000
8/17/2012	2:35:01 PM	PH3 MFC set to  0.000000
8/17/2012	2:35:01 PM	SiCl4 MFC set to  0.000000
8/17/2012	2:35:01 PM	Bypass solenoid MFC set to  0.000000
8/17/2012	2:35:01 PM	Tube furnace set to 0
8/17/2012	2:36:07 PM	Helium valve closed
8/17/2012	2:36:07 PM	H2 valve closed
8/17/2012	2:36:07 PM	BCl3 valve closed
8/17/2012	2:36:07 PM	PH3 valve closed
8/17/2012	2:36:07 PM	SiCl4 pre valve closed
8/17/2012	2:36:07 PM	SiCl4 post valve closed
8/17/2012	2:36:07 PM	Bypass valve closed
8/17/2012	2:36:07 PM	Bubbler valve closed
8/17/2012	2:36:07 PM	Main Vac valve opened
8/17/2012	2:36:07 PM	Helium MFC set to  0.000000
8/17/2012	2:36:07 PM	H2 MFC set to  0.000000
8/17/2012	2:36:08 PM	BCl3 MFC set to  0.000000
8/17/2012	2:36:08 PM	PH3 MFC set to  0.000000
8/17/2012	2:36:08 PM	SiCl4 MFC set to  0.000000
8/17/2012	2:36:08 PM	Bypass solenoid MFC set to  0.000000
8/17/2012	2:36:08 PM	Tube furnace set to 0
8/17/2012	2:36:09 PM	Run finished at 2:36 PM
8/17/2012	3:11:52 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/17/2012	3:11:52 PM	Recipe started at 3:11 PM
8/17/2012	3:11:52 PM	Helium valve closed
8/17/2012	3:11:52 PM	H2 valve closed
8/17/2012	3:11:52 PM	BCl3 valve closed
8/17/2012	3:11:52 PM	PH3 valve closed
8/17/2012	3:11:52 PM	SiCl4 pre valve closed
8/17/2012	3:11:53 PM	SiCl4 post valve closed
8/17/2012	3:11:53 PM	Main Vac valve closed
8/17/2012	3:11:53 PM	Bypass valve closed
8/17/2012	3:11:53 PM	Bubbler valve closed
8/17/2012	3:11:53 PM	Helium MFC set to  0.000000
8/17/2012	3:11:53 PM	H2 MFC set to  0.000000
8/17/2012	3:11:53 PM	BCl3 MFC set to  0.000000
8/17/2012	3:11:53 PM	PH3 MFC set to  0.000000
8/17/2012	3:11:53 PM	SiCl4 MFC set to  0.000000
8/17/2012	3:11:53 PM	Bypass solenoid MFC set to  0.000000
8/17/2012	3:11:53 PM	Tube furnace set to 0
8/17/2012	3:11:56 PM	H2 valve closed
8/17/2012	3:11:56 PM	BCl3 valve closed
8/17/2012	3:11:56 PM	PH3 valve closed
8/17/2012	3:11:56 PM	SiCl4 pre valve closed
8/17/2012	3:11:56 PM	SiCl4 post valve closed
8/17/2012	3:11:56 PM	Main Vac valve closed
8/17/2012	3:11:56 PM	Bypass valve closed
8/17/2012	3:11:56 PM	Bubbler valve closed
8/17/2012	3:11:56 PM	Helium valve opened
8/17/2012	3:11:56 PM	Helium MFC set to  500.000000
8/17/2012	3:11:56 PM	H2 MFC set to  0.000000
8/17/2012	3:11:56 PM	BCl3 MFC set to  0.000000
8/17/2012	3:11:56 PM	PH3 MFC set to  0.000000
8/17/2012	3:11:56 PM	SiCl4 MFC set to  0.000000
8/17/2012	3:11:56 PM	Bypass solenoid MFC set to  0.000000
8/17/2012	3:11:56 PM	Tube furnace set to 0
8/17/2012	3:13:03 PM	Helium valve closed
8/17/2012	3:13:03 PM	H2 valve closed
8/17/2012	3:13:03 PM	BCl3 valve closed
8/17/2012	3:13:03 PM	PH3 valve closed
8/17/2012	3:13:03 PM	SiCl4 pre valve closed
8/17/2012	3:13:03 PM	SiCl4 post valve closed
8/17/2012	3:13:03 PM	Main Vac valve closed
8/17/2012	3:13:03 PM	Bypass valve closed
8/17/2012	3:13:03 PM	Bubbler valve closed
8/17/2012	3:13:03 PM	Helium MFC set to  0.000000
8/17/2012	3:13:03 PM	H2 MFC set to  0.000000
8/17/2012	3:13:03 PM	BCl3 MFC set to  0.000000
8/17/2012	3:13:03 PM	PH3 MFC set to  0.000000
8/17/2012	3:13:03 PM	SiCl4 MFC set to  0.000000
8/17/2012	3:13:03 PM	Bypass solenoid MFC set to  0.000000
8/17/2012	3:13:03 PM	Tube furnace set to 0
8/17/2012	3:13:04 PM	Run finished at 3:13 PM
8/17/2012	3:13:04 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/17/2012	3:17:11 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/17/2012	3:17:12 PM	Recipe started at 3:17 PM
8/17/2012	3:17:12 PM	Helium valve closed
8/17/2012	3:17:12 PM	H2 valve closed
8/17/2012	3:17:12 PM	BCl3 valve closed
8/17/2012	3:17:12 PM	PH3 valve closed
8/17/2012	3:17:12 PM	SiCl4 pre valve closed
8/17/2012	3:17:12 PM	SiCl4 post valve closed
8/17/2012	3:17:12 PM	Main Vac valve closed
8/17/2012	3:17:12 PM	Bubbler valve closed
8/17/2012	3:17:12 PM	Bypass valve opened
8/17/2012	3:17:12 PM	Helium MFC set to  0.000000
8/17/2012	3:17:12 PM	H2 MFC set to  0.000000
8/17/2012	3:17:12 PM	BCl3 MFC set to  0.000000
8/17/2012	3:17:12 PM	PH3 MFC set to  0.000000
8/17/2012	3:17:12 PM	SiCl4 MFC set to  0.000000
8/17/2012	3:17:12 PM	Bypass solenoid MFC set to  0.000000
8/17/2012	3:17:12 PM	Tube furnace set to 0
8/17/2012	3:18:36 PM	Helium valve closed
8/17/2012	3:18:36 PM	H2 valve closed
8/17/2012	3:18:36 PM	BCl3 valve closed
8/17/2012	3:18:36 PM	PH3 valve closed
8/17/2012	3:18:36 PM	SiCl4 pre valve closed
8/17/2012	3:18:36 PM	SiCl4 post valve closed
8/17/2012	3:18:36 PM	Main Vac valve closed
8/17/2012	3:18:36 PM	Bubbler valve closed
8/17/2012	3:18:36 PM	Bypass valve opened
8/17/2012	3:18:36 PM	Helium MFC set to  0.000000
8/17/2012	3:18:36 PM	H2 MFC set to  0.000000
8/17/2012	3:18:36 PM	BCl3 MFC set to  0.000000
8/17/2012	3:18:36 PM	PH3 MFC set to  0.000000
8/17/2012	3:18:36 PM	SiCl4 MFC set to  0.000000
8/17/2012	3:18:36 PM	Bypass solenoid MFC set to  0.000000
8/17/2012	3:18:36 PM	Tube furnace set to 0
8/17/2012	3:19:36 PM	Helium valve closed
8/17/2012	3:19:36 PM	H2 valve closed
8/17/2012	3:19:36 PM	BCl3 valve closed
8/17/2012	3:19:36 PM	PH3 valve closed
8/17/2012	3:19:36 PM	SiCl4 pre valve closed
8/17/2012	3:19:36 PM	SiCl4 post valve closed
8/17/2012	3:19:36 PM	Bypass valve closed
8/17/2012	3:19:36 PM	Bubbler valve closed
8/17/2012	3:19:36 PM	Main Vac valve opened
8/17/2012	3:19:36 PM	Helium MFC set to  0.000000
8/17/2012	3:19:36 PM	H2 MFC set to  0.000000
8/17/2012	3:19:36 PM	BCl3 MFC set to  0.000000
8/17/2012	3:19:36 PM	PH3 MFC set to  0.000000
8/17/2012	3:19:36 PM	SiCl4 MFC set to  0.000000
8/17/2012	3:19:36 PM	Bypass solenoid MFC set to  0.000000
8/17/2012	3:19:36 PM	Tube furnace set to 0
8/17/2012	3:19:37 PM	Run finished at 3:19 PM
8/17/2012	3:19:37 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/17/2012	3:59:38 PM	Recipe started at 3:59 PM
8/17/2012	3:59:38 PM	Helium valve closed
8/17/2012	3:59:38 PM	H2 valve closed
8/17/2012	3:59:38 PM	BCl3 valve closed
8/17/2012	3:59:38 PM	PH3 valve closed
8/17/2012	3:59:39 PM	SiCl4 pre valve closed
8/17/2012	3:59:39 PM	SiCl4 post valve closed
8/17/2012	3:59:39 PM	Main Vac valve closed
8/17/2012	3:59:39 PM	Bypass valve closed
8/17/2012	3:59:39 PM	Bubbler valve closed
8/17/2012	3:59:39 PM	Helium MFC set to  0.000000
8/17/2012	3:59:39 PM	H2 MFC set to  0.000000
8/17/2012	3:59:39 PM	BCl3 MFC set to  0.000000
8/17/2012	3:59:39 PM	PH3 MFC set to  0.000000
8/17/2012	3:59:39 PM	SiCl4 MFC set to  0.000000
8/17/2012	3:59:39 PM	Bypass solenoid MFC set to  0.000000
8/17/2012	3:59:39 PM	Tube furnace set to 0
8/17/2012	3:59:42 PM	Helium valve closed
8/17/2012	3:59:42 PM	BCl3 valve closed
8/17/2012	3:59:42 PM	PH3 valve closed
8/17/2012	3:59:42 PM	SiCl4 pre valve closed
8/17/2012	3:59:42 PM	SiCl4 post valve closed
8/17/2012	3:59:42 PM	Main Vac valve closed
8/17/2012	3:59:42 PM	Bypass valve closed
8/17/2012	3:59:42 PM	Bubbler valve closed
8/17/2012	3:59:42 PM	H2 valve opened
8/17/2012	3:59:42 PM	Helium MFC set to  0.000000
8/17/2012	3:59:42 PM	H2 MFC set to  500.000000
8/17/2012	3:59:42 PM	BCl3 MFC set to  0.000000
8/17/2012	3:59:42 PM	PH3 MFC set to  0.000000
8/17/2012	3:59:42 PM	SiCl4 MFC set to  0.000000
8/17/2012	3:59:42 PM	Bypass solenoid MFC set to  0.000000
8/17/2012	3:59:42 PM	Tube furnace set to 50
8/17/2012	4:00:54 PM	Helium valve closed
8/17/2012	4:00:54 PM	BCl3 valve closed
8/17/2012	4:00:54 PM	PH3 valve closed
8/17/2012	4:00:54 PM	SiCl4 pre valve closed
8/17/2012	4:00:54 PM	SiCl4 post valve closed
8/17/2012	4:00:54 PM	Main Vac valve closed
8/17/2012	4:00:54 PM	Bypass valve closed
8/17/2012	4:00:54 PM	H2 valve opened
8/17/2012	4:00:54 PM	Bubbler valve opened
8/17/2012	4:00:54 PM	Helium MFC set to  0.000000
8/17/2012	4:00:54 PM	H2 MFC set to  500.000000
8/17/2012	4:00:54 PM	BCl3 MFC set to  0.000000
8/17/2012	4:00:54 PM	PH3 MFC set to  0.000000
8/17/2012	4:00:54 PM	SiCl4 MFC set to  0.000000
8/17/2012	4:00:54 PM	Bypass solenoid MFC set to  0.000000
8/17/2012	4:00:54 PM	Tube furnace set to 50
8/17/2012	4:00:55 PM	Helium valve closed
8/17/2012	4:00:55 PM	BCl3 valve closed
8/17/2012	4:00:55 PM	PH3 valve closed
8/17/2012	4:00:55 PM	SiCl4 pre valve closed
8/17/2012	4:00:55 PM	SiCl4 post valve closed
8/17/2012	4:00:55 PM	Main Vac valve closed
8/17/2012	4:00:55 PM	Bypass valve closed
8/17/2012	4:00:55 PM	H2 valve opened
8/17/2012	4:00:55 PM	Bubbler valve opened
8/17/2012	4:00:55 PM	Helium MFC set to  0.000000
8/17/2012	4:00:55 PM	H2 MFC set to  500.000000
8/17/2012	4:00:55 PM	BCl3 MFC set to  0.000000
8/17/2012	4:00:55 PM	PH3 MFC set to  0.000000
8/17/2012	4:00:55 PM	SiCl4 MFC set to  0.000000
8/17/2012	4:00:55 PM	Bypass solenoid MFC set to  0.000000
8/17/2012	4:00:55 PM	Tube furnace set to 1000
8/17/2012	4:20:55 PM	Helium valve closed
8/17/2012	4:20:55 PM	PH3 valve closed
8/17/2012	4:20:55 PM	Main Vac valve closed
8/17/2012	4:20:55 PM	Bypass valve closed
8/17/2012	4:20:55 PM	H2 valve opened
8/17/2012	4:20:55 PM	BCl3 valve opened
8/17/2012	4:20:55 PM	SiCl4 pre valve opened
8/17/2012	4:20:55 PM	SiCl4 post valve opened
8/17/2012	4:20:55 PM	Bubbler valve opened
8/17/2012	4:20:55 PM	Helium MFC set to  0.000000
8/17/2012	4:20:55 PM	H2 MFC set to  500.000000
8/17/2012	4:20:55 PM	BCl3 MFC set to  1.000000
8/17/2012	4:20:55 PM	PH3 MFC set to  0.000000
8/17/2012	4:20:55 PM	SiCl4 MFC set to  50.000000
8/17/2012	4:20:55 PM	Bypass solenoid MFC set to  0.000000
8/17/2012	4:20:55 PM	Tube furnace set to 1000
8/17/2012	4:40:55 PM	Helium valve closed
8/17/2012	4:40:55 PM	BCl3 valve closed
8/17/2012	4:40:55 PM	PH3 valve closed
8/17/2012	4:40:55 PM	SiCl4 pre valve closed
8/17/2012	4:40:55 PM	SiCl4 post valve closed
8/17/2012	4:40:55 PM	Main Vac valve closed
8/17/2012	4:40:55 PM	Bypass valve closed
8/17/2012	4:40:55 PM	H2 valve opened
8/17/2012	4:40:55 PM	Bubbler valve opened
8/17/2012	4:40:55 PM	Helium MFC set to  0.000000
8/17/2012	4:40:55 PM	H2 MFC set to  500.000000
8/17/2012	4:40:55 PM	BCl3 MFC set to  0.000000
8/17/2012	4:40:55 PM	PH3 MFC set to  0.000000
8/17/2012	4:40:55 PM	SiCl4 MFC set to  0.000000
8/17/2012	4:40:55 PM	Bypass solenoid MFC set to  0.000000
8/17/2012	4:40:55 PM	Tube furnace set to 950
8/17/2012	4:43:55 PM	Helium valve closed
8/17/2012	4:43:55 PM	BCl3 valve closed
8/17/2012	4:43:55 PM	PH3 valve closed
8/17/2012	4:43:56 PM	SiCl4 pre valve closed
8/17/2012	4:43:56 PM	SiCl4 post valve closed
8/17/2012	4:43:56 PM	Main Vac valve closed
8/17/2012	4:43:56 PM	Bypass valve closed
8/17/2012	4:43:56 PM	H2 valve opened
8/17/2012	4:43:56 PM	Bubbler valve opened
8/17/2012	4:43:56 PM	Helium MFC set to  0.000000
8/17/2012	4:43:56 PM	H2 MFC set to  500.000000
8/17/2012	4:43:56 PM	BCl3 MFC set to  0.000000
8/17/2012	4:43:56 PM	PH3 MFC set to  0.000000
8/17/2012	4:43:56 PM	SiCl4 MFC set to  0.000000
8/17/2012	4:43:56 PM	Bypass solenoid MFC set to  0.000000
8/17/2012	4:43:56 PM	Tube furnace set to 900
8/17/2012	4:46:56 PM	Helium valve closed
8/17/2012	4:46:56 PM	BCl3 valve closed
8/17/2012	4:46:56 PM	PH3 valve closed
8/17/2012	4:46:56 PM	SiCl4 pre valve closed
8/17/2012	4:46:56 PM	SiCl4 post valve closed
8/17/2012	4:46:56 PM	Main Vac valve closed
8/17/2012	4:46:56 PM	Bypass valve closed
8/17/2012	4:46:56 PM	H2 valve opened
8/17/2012	4:46:56 PM	Bubbler valve opened
8/17/2012	4:46:56 PM	Helium MFC set to  0.000000
8/17/2012	4:46:56 PM	H2 MFC set to  500.000000
8/17/2012	4:46:56 PM	BCl3 MFC set to  0.000000
8/17/2012	4:46:56 PM	PH3 MFC set to  0.000000
8/17/2012	4:46:56 PM	SiCl4 MFC set to  0.000000
8/17/2012	4:46:56 PM	Bypass solenoid MFC set to  0.000000
8/17/2012	4:46:56 PM	Tube furnace set to 850
8/17/2012	4:49:56 PM	Helium valve closed
8/17/2012	4:49:56 PM	BCl3 valve closed
8/17/2012	4:49:56 PM	PH3 valve closed
8/17/2012	4:49:56 PM	SiCl4 pre valve closed
8/17/2012	4:49:56 PM	SiCl4 post valve closed
8/17/2012	4:49:56 PM	Main Vac valve closed
8/17/2012	4:49:56 PM	Bypass valve closed
8/17/2012	4:49:56 PM	H2 valve opened
8/17/2012	4:49:56 PM	Bubbler valve opened
8/17/2012	4:49:56 PM	Helium MFC set to  0.000000
8/17/2012	4:49:56 PM	H2 MFC set to  500.000000
8/17/2012	4:49:56 PM	BCl3 MFC set to  0.000000
8/17/2012	4:49:56 PM	PH3 MFC set to  0.000000
8/17/2012	4:49:56 PM	SiCl4 MFC set to  0.000000
8/17/2012	4:49:56 PM	Bypass solenoid MFC set to  0.000000
8/17/2012	4:49:56 PM	Tube furnace set to 800
8/17/2012	4:52:56 PM	Helium valve closed
8/17/2012	4:52:56 PM	BCl3 valve closed
8/17/2012	4:52:56 PM	PH3 valve closed
8/17/2012	4:52:56 PM	SiCl4 pre valve closed
8/17/2012	4:52:56 PM	SiCl4 post valve closed
8/17/2012	4:52:56 PM	Main Vac valve closed
8/17/2012	4:52:56 PM	Bypass valve closed
8/17/2012	4:52:56 PM	H2 valve opened
8/17/2012	4:52:56 PM	Bubbler valve opened
8/17/2012	4:52:56 PM	Helium MFC set to  0.000000
8/17/2012	4:52:56 PM	H2 MFC set to  500.000000
8/17/2012	4:52:56 PM	BCl3 MFC set to  0.000000
8/17/2012	4:52:56 PM	PH3 MFC set to  0.000000
8/17/2012	4:52:56 PM	SiCl4 MFC set to  0.000000
8/17/2012	4:52:56 PM	Bypass solenoid MFC set to  0.000000
8/17/2012	4:52:56 PM	Tube furnace set to 750
8/17/2012	4:55:56 PM	H2 valve closed
8/17/2012	4:55:56 PM	BCl3 valve closed
8/17/2012	4:55:56 PM	PH3 valve closed
8/17/2012	4:55:56 PM	SiCl4 pre valve closed
8/17/2012	4:55:56 PM	SiCl4 post valve closed
8/17/2012	4:55:56 PM	Main Vac valve closed
8/17/2012	4:55:56 PM	Bypass valve closed
8/17/2012	4:55:56 PM	Helium valve opened
8/17/2012	4:55:56 PM	Bubbler valve opened
8/17/2012	4:55:56 PM	Helium MFC set to  400.000000
8/17/2012	4:55:56 PM	H2 MFC set to  0.000000
8/17/2012	4:55:56 PM	BCl3 MFC set to  0.000000
8/17/2012	4:55:56 PM	PH3 MFC set to  0.000000
8/17/2012	4:55:56 PM	SiCl4 MFC set to  0.000000
8/17/2012	4:55:56 PM	Bypass solenoid MFC set to  0.000000
8/17/2012	4:55:57 PM	Tube furnace set to 0
8/17/2012	5:04:39 PM	Helium valve closed
8/17/2012	5:04:39 PM	H2 valve closed
8/17/2012	5:04:39 PM	BCl3 valve closed
8/17/2012	5:04:39 PM	PH3 valve closed
8/17/2012	5:04:39 PM	SiCl4 pre valve closed
8/17/2012	5:04:39 PM	SiCl4 post valve closed
8/17/2012	5:04:39 PM	Main Vac valve closed
8/17/2012	5:04:39 PM	Bypass valve closed
8/17/2012	5:04:39 PM	Bubbler valve closed
8/17/2012	5:04:39 PM	Helium MFC set to  0.000000
8/17/2012	5:04:39 PM	H2 MFC set to  0.000000
8/17/2012	5:04:39 PM	BCl3 MFC set to  0.000000
8/17/2012	5:04:39 PM	PH3 MFC set to  0.000000
8/17/2012	5:04:39 PM	SiCl4 MFC set to  0.000000
8/17/2012	5:04:39 PM	Bypass solenoid MFC set to  0.000000
8/17/2012	5:04:39 PM	Tube furnace set to 50
8/17/2012	5:04:40 PM	Helium valve closed
8/17/2012	5:04:40 PM	H2 valve closed
8/17/2012	5:04:40 PM	BCl3 valve closed
8/17/2012	5:04:40 PM	PH3 valve closed
8/17/2012	5:04:40 PM	SiCl4 pre valve closed
8/17/2012	5:04:40 PM	SiCl4 post valve closed
8/17/2012	5:04:40 PM	Main Vac valve closed
8/17/2012	5:04:40 PM	Bubbler valve closed
8/17/2012	5:04:40 PM	Bypass valve opened
8/17/2012	5:04:40 PM	Helium MFC set to  0.000000
8/17/2012	5:04:40 PM	H2 MFC set to  0.000000
8/17/2012	5:04:40 PM	BCl3 MFC set to  0.000000
8/17/2012	5:04:40 PM	PH3 MFC set to  0.000000
8/17/2012	5:04:40 PM	SiCl4 MFC set to  0.000000
8/17/2012	5:04:40 PM	Bypass solenoid MFC set to  0.000000
8/17/2012	5:04:40 PM	Tube furnace set to 0
8/17/2012	5:05:49 PM	Helium valve closed
8/17/2012	5:05:49 PM	H2 valve closed
8/17/2012	5:05:49 PM	BCl3 valve closed
8/17/2012	5:05:49 PM	PH3 valve closed
8/17/2012	5:05:49 PM	SiCl4 pre valve closed
8/17/2012	5:05:49 PM	SiCl4 post valve closed
8/17/2012	5:05:49 PM	Bypass valve closed
8/17/2012	5:05:49 PM	Bubbler valve closed
8/17/2012	5:05:49 PM	Main Vac valve opened
8/17/2012	5:05:49 PM	Helium MFC set to  0.000000
8/17/2012	5:05:49 PM	H2 MFC set to  0.000000
8/17/2012	5:05:49 PM	BCl3 MFC set to  0.000000
8/17/2012	5:05:49 PM	PH3 MFC set to  0.000000
8/17/2012	5:05:49 PM	SiCl4 MFC set to  0.000000
8/17/2012	5:05:49 PM	Bypass solenoid MFC set to  0.000000
8/17/2012	5:05:49 PM	Tube furnace set to 0
8/17/2012	5:05:50 PM	Run finished at 5:05 PM
8/17/2012	5:05:57 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/17/2012	5:05:58 PM	Recipe started at 5:05 PM
8/17/2012	5:05:58 PM	Helium valve closed
8/17/2012	5:05:58 PM	H2 valve closed
8/17/2012	5:05:58 PM	BCl3 valve closed
8/17/2012	5:05:58 PM	PH3 valve closed
8/17/2012	5:05:58 PM	SiCl4 pre valve closed
8/17/2012	5:05:58 PM	SiCl4 post valve closed
8/17/2012	5:05:58 PM	Main Vac valve closed
8/17/2012	5:05:58 PM	Bypass valve closed
8/17/2012	5:05:58 PM	Bubbler valve closed
8/17/2012	5:05:58 PM	Helium MFC set to  0.000000
8/17/2012	5:05:58 PM	H2 MFC set to  0.000000
8/17/2012	5:05:58 PM	BCl3 MFC set to  0.000000
8/17/2012	5:05:58 PM	PH3 MFC set to  0.000000
8/17/2012	5:05:58 PM	SiCl4 MFC set to  0.000000
8/17/2012	5:05:58 PM	Bypass solenoid MFC set to  0.000000
8/17/2012	5:05:58 PM	Tube furnace set to 0
8/17/2012	5:06:01 PM	H2 valve closed
8/17/2012	5:06:01 PM	BCl3 valve closed
8/17/2012	5:06:01 PM	PH3 valve closed
8/17/2012	5:06:01 PM	SiCl4 pre valve closed
8/17/2012	5:06:01 PM	SiCl4 post valve closed
8/17/2012	5:06:01 PM	Main Vac valve closed
8/17/2012	5:06:01 PM	Bypass valve closed
8/17/2012	5:06:01 PM	Bubbler valve closed
8/17/2012	5:06:01 PM	Helium valve opened
8/17/2012	5:06:01 PM	Helium MFC set to  500.000000
8/17/2012	5:06:01 PM	H2 MFC set to  0.000000
8/17/2012	5:06:01 PM	BCl3 MFC set to  0.000000
8/17/2012	5:06:01 PM	PH3 MFC set to  0.000000
8/17/2012	5:06:01 PM	SiCl4 MFC set to  0.000000
8/17/2012	5:06:01 PM	Bypass solenoid MFC set to  0.000000
8/17/2012	5:06:01 PM	Tube furnace set to 0
8/17/2012	5:07:08 PM	Helium valve closed
8/17/2012	5:07:08 PM	H2 valve closed
8/17/2012	5:07:08 PM	BCl3 valve closed
8/17/2012	5:07:08 PM	PH3 valve closed
8/17/2012	5:07:08 PM	SiCl4 pre valve closed
8/17/2012	5:07:08 PM	SiCl4 post valve closed
8/17/2012	5:07:08 PM	Main Vac valve closed
8/17/2012	5:07:08 PM	Bypass valve closed
8/17/2012	5:07:08 PM	Bubbler valve closed
8/17/2012	5:07:08 PM	Helium MFC set to  0.000000
8/17/2012	5:07:08 PM	H2 MFC set to  0.000000
8/17/2012	5:07:08 PM	BCl3 MFC set to  0.000000
8/17/2012	5:07:08 PM	PH3 MFC set to  0.000000
8/17/2012	5:07:08 PM	SiCl4 MFC set to  0.000000
8/17/2012	5:07:08 PM	Bypass solenoid MFC set to  0.000000
8/17/2012	5:07:08 PM	Tube furnace set to 0
8/17/2012	5:07:09 PM	Run finished at 5:07 PM
8/17/2012	5:07:09 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/17/2012	5:10:49 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/17/2012	5:10:50 PM	Recipe started at 5:10 PM
8/17/2012	5:10:50 PM	Helium valve closed
8/17/2012	5:10:50 PM	H2 valve closed
8/17/2012	5:10:50 PM	BCl3 valve closed
8/17/2012	5:10:50 PM	PH3 valve closed
8/17/2012	5:10:50 PM	SiCl4 pre valve closed
8/17/2012	5:10:50 PM	SiCl4 post valve closed
8/17/2012	5:10:50 PM	Main Vac valve closed
8/17/2012	5:10:50 PM	Bubbler valve closed
8/17/2012	5:10:50 PM	Bypass valve opened
8/17/2012	5:10:50 PM	Helium MFC set to  0.000000
8/17/2012	5:10:50 PM	H2 MFC set to  0.000000
8/17/2012	5:10:50 PM	BCl3 MFC set to  0.000000
8/17/2012	5:10:50 PM	PH3 MFC set to  0.000000
8/17/2012	5:10:50 PM	SiCl4 MFC set to  0.000000
8/17/2012	5:10:50 PM	Bypass solenoid MFC set to  0.000000
8/17/2012	5:10:50 PM	Tube furnace set to 0
8/17/2012	5:12:05 PM	Helium valve closed
8/17/2012	5:12:05 PM	H2 valve closed
8/17/2012	5:12:05 PM	BCl3 valve closed
8/17/2012	5:12:05 PM	PH3 valve closed
8/17/2012	5:12:05 PM	SiCl4 pre valve closed
8/17/2012	5:12:05 PM	SiCl4 post valve closed
8/17/2012	5:12:05 PM	Main Vac valve closed
8/17/2012	5:12:05 PM	Bubbler valve closed
8/17/2012	5:12:05 PM	Bypass valve opened
8/17/2012	5:12:05 PM	Helium MFC set to  0.000000
8/17/2012	5:12:05 PM	H2 MFC set to  0.000000
8/17/2012	5:12:05 PM	BCl3 MFC set to  0.000000
8/17/2012	5:12:05 PM	PH3 MFC set to  0.000000
8/17/2012	5:12:05 PM	SiCl4 MFC set to  0.000000
8/17/2012	5:12:05 PM	Bypass solenoid MFC set to  0.000000
8/17/2012	5:12:05 PM	Tube furnace set to 0
8/17/2012	5:13:05 PM	Helium valve closed
8/17/2012	5:13:05 PM	H2 valve closed
8/17/2012	5:13:05 PM	BCl3 valve closed
8/17/2012	5:13:05 PM	PH3 valve closed
8/17/2012	5:13:05 PM	SiCl4 pre valve closed
8/17/2012	5:13:05 PM	SiCl4 post valve closed
8/17/2012	5:13:05 PM	Bypass valve closed
8/17/2012	5:13:05 PM	Bubbler valve closed
8/17/2012	5:13:05 PM	Main Vac valve opened
8/17/2012	5:13:05 PM	Helium MFC set to  0.000000
8/17/2012	5:13:05 PM	H2 MFC set to  0.000000
8/17/2012	5:13:05 PM	BCl3 MFC set to  0.000000
8/17/2012	5:13:05 PM	PH3 MFC set to  0.000000
8/17/2012	5:13:05 PM	SiCl4 MFC set to  0.000000
8/17/2012	5:13:05 PM	Bypass solenoid MFC set to  0.000000
8/17/2012	5:13:05 PM	Tube furnace set to 0
8/17/2012	5:13:06 PM	Run finished at 5:13 PM
8/17/2012	5:13:06 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/17/2012	6:35:57 PM	Recipe started at 6:35 PM
8/17/2012	6:35:57 PM	Helium valve closed
8/17/2012	6:35:57 PM	H2 valve closed
8/17/2012	6:35:57 PM	BCl3 valve closed
8/17/2012	6:35:57 PM	PH3 valve closed
8/17/2012	6:35:57 PM	SiCl4 pre valve closed
8/17/2012	6:35:57 PM	SiCl4 post valve closed
8/17/2012	6:35:57 PM	Main Vac valve closed
8/17/2012	6:35:57 PM	Bypass valve closed
8/17/2012	6:35:57 PM	Bubbler valve closed
8/17/2012	6:35:57 PM	Helium MFC set to  0.000000
8/17/2012	6:35:57 PM	H2 MFC set to  0.000000
8/17/2012	6:35:57 PM	BCl3 MFC set to  0.000000
8/17/2012	6:35:57 PM	PH3 MFC set to  0.000000
8/17/2012	6:35:57 PM	SiCl4 MFC set to  0.000000
8/17/2012	6:35:57 PM	Bypass solenoid MFC set to  0.000000
8/17/2012	6:35:57 PM	Tube furnace set to 0
8/17/2012	6:36:00 PM	Helium valve closed
8/17/2012	6:36:00 PM	BCl3 valve closed
8/17/2012	6:36:00 PM	PH3 valve closed
8/17/2012	6:36:00 PM	SiCl4 pre valve closed
8/17/2012	6:36:00 PM	SiCl4 post valve closed
8/17/2012	6:36:00 PM	Main Vac valve closed
8/17/2012	6:36:00 PM	Bypass valve closed
8/17/2012	6:36:00 PM	Bubbler valve closed
8/17/2012	6:36:00 PM	H2 valve opened
8/17/2012	6:36:00 PM	Helium MFC set to  0.000000
8/17/2012	6:36:00 PM	H2 MFC set to  500.000000
8/17/2012	6:36:00 PM	BCl3 MFC set to  0.000000
8/17/2012	6:36:00 PM	PH3 MFC set to  0.000000
8/17/2012	6:36:00 PM	SiCl4 MFC set to  0.000000
8/17/2012	6:36:00 PM	Bypass solenoid MFC set to  0.000000
8/17/2012	6:36:00 PM	Tube furnace set to 50
8/17/2012	6:37:13 PM	Helium valve closed
8/17/2012	6:37:13 PM	BCl3 valve closed
8/17/2012	6:37:13 PM	PH3 valve closed
8/17/2012	6:37:13 PM	SiCl4 pre valve closed
8/17/2012	6:37:13 PM	SiCl4 post valve closed
8/17/2012	6:37:13 PM	Main Vac valve closed
8/17/2012	6:37:13 PM	Bypass valve closed
8/17/2012	6:37:13 PM	H2 valve opened
8/17/2012	6:37:13 PM	Bubbler valve opened
8/17/2012	6:37:13 PM	Helium MFC set to  0.000000
8/17/2012	6:37:13 PM	H2 MFC set to  500.000000
8/17/2012	6:37:13 PM	BCl3 MFC set to  0.000000
8/17/2012	6:37:13 PM	PH3 MFC set to  0.000000
8/17/2012	6:37:13 PM	SiCl4 MFC set to  0.000000
8/17/2012	6:37:13 PM	Bypass solenoid MFC set to  0.000000
8/17/2012	6:37:13 PM	Tube furnace set to 50
8/17/2012	6:37:14 PM	Helium valve closed
8/17/2012	6:37:14 PM	BCl3 valve closed
8/17/2012	6:37:14 PM	PH3 valve closed
8/17/2012	6:37:14 PM	SiCl4 pre valve closed
8/17/2012	6:37:14 PM	SiCl4 post valve closed
8/17/2012	6:37:14 PM	Main Vac valve closed
8/17/2012	6:37:14 PM	Bypass valve closed
8/17/2012	6:37:14 PM	H2 valve opened
8/17/2012	6:37:14 PM	Bubbler valve opened
8/17/2012	6:37:14 PM	Helium MFC set to  0.000000
8/17/2012	6:37:14 PM	H2 MFC set to  500.000000
8/17/2012	6:37:14 PM	BCl3 MFC set to  0.000000
8/17/2012	6:37:14 PM	PH3 MFC set to  0.000000
8/17/2012	6:37:14 PM	SiCl4 MFC set to  0.000000
8/17/2012	6:37:14 PM	Bypass solenoid MFC set to  0.000000
8/17/2012	6:37:14 PM	Tube furnace set to 1000
8/17/2012	6:57:14 PM	Helium valve closed
8/17/2012	6:57:14 PM	PH3 valve closed
8/17/2012	6:57:14 PM	Main Vac valve closed
8/17/2012	6:57:14 PM	Bypass valve closed
8/17/2012	6:57:14 PM	H2 valve opened
8/17/2012	6:57:15 PM	BCl3 valve opened
8/17/2012	6:57:15 PM	SiCl4 pre valve opened
8/17/2012	6:57:15 PM	SiCl4 post valve opened
8/17/2012	6:57:15 PM	Bubbler valve opened
8/17/2012	6:57:15 PM	Helium MFC set to  0.000000
8/17/2012	6:57:15 PM	H2 MFC set to  500.000000
8/17/2012	6:57:15 PM	BCl3 MFC set to  1.000000
8/17/2012	6:57:15 PM	PH3 MFC set to  0.000000
8/17/2012	6:57:15 PM	SiCl4 MFC set to  50.000000
8/17/2012	6:57:15 PM	Bypass solenoid MFC set to  0.000000
8/17/2012	6:57:15 PM	Tube furnace set to 1000
8/17/2012	7:17:15 PM	Helium valve closed
8/17/2012	7:17:15 PM	BCl3 valve closed
8/17/2012	7:17:15 PM	PH3 valve closed
8/17/2012	7:17:15 PM	SiCl4 pre valve closed
8/17/2012	7:17:15 PM	SiCl4 post valve closed
8/17/2012	7:17:15 PM	Main Vac valve closed
8/17/2012	7:17:15 PM	Bypass valve closed
8/17/2012	7:17:15 PM	H2 valve opened
8/17/2012	7:17:15 PM	Bubbler valve opened
8/17/2012	7:17:15 PM	Helium MFC set to  0.000000
8/17/2012	7:17:15 PM	H2 MFC set to  500.000000
8/17/2012	7:17:15 PM	BCl3 MFC set to  0.000000
8/17/2012	7:17:15 PM	PH3 MFC set to  0.000000
8/17/2012	7:17:15 PM	SiCl4 MFC set to  0.000000
8/17/2012	7:17:15 PM	Bypass solenoid MFC set to  0.000000
8/17/2012	7:17:15 PM	Tube furnace set to 950
8/17/2012	7:20:15 PM	Helium valve closed
8/17/2012	7:20:15 PM	BCl3 valve closed
8/17/2012	7:20:15 PM	PH3 valve closed
8/17/2012	7:20:15 PM	SiCl4 pre valve closed
8/17/2012	7:20:15 PM	SiCl4 post valve closed
8/17/2012	7:20:15 PM	Main Vac valve closed
8/17/2012	7:20:15 PM	Bypass valve closed
8/17/2012	7:20:15 PM	H2 valve opened
8/17/2012	7:20:15 PM	Bubbler valve opened
8/17/2012	7:20:15 PM	Helium MFC set to  0.000000
8/17/2012	7:20:15 PM	H2 MFC set to  500.000000
8/17/2012	7:20:15 PM	BCl3 MFC set to  0.000000
8/17/2012	7:20:15 PM	PH3 MFC set to  0.000000
8/17/2012	7:20:15 PM	SiCl4 MFC set to  0.000000
8/17/2012	7:20:15 PM	Bypass solenoid MFC set to  0.000000
8/17/2012	7:20:15 PM	Tube furnace set to 900
8/17/2012	7:23:15 PM	Helium valve closed
8/17/2012	7:23:15 PM	BCl3 valve closed
8/17/2012	7:23:15 PM	PH3 valve closed
8/17/2012	7:23:15 PM	SiCl4 pre valve closed
8/17/2012	7:23:15 PM	SiCl4 post valve closed
8/17/2012	7:23:15 PM	Main Vac valve closed
8/17/2012	7:23:15 PM	Bypass valve closed
8/17/2012	7:23:15 PM	H2 valve opened
8/17/2012	7:23:15 PM	Bubbler valve opened
8/17/2012	7:23:15 PM	Helium MFC set to  0.000000
8/17/2012	7:23:15 PM	H2 MFC set to  500.000000
8/17/2012	7:23:15 PM	BCl3 MFC set to  0.000000
8/17/2012	7:23:15 PM	PH3 MFC set to  0.000000
8/17/2012	7:23:15 PM	SiCl4 MFC set to  0.000000
8/17/2012	7:23:15 PM	Bypass solenoid MFC set to  0.000000
8/17/2012	7:23:15 PM	Tube furnace set to 850
8/17/2012	7:26:16 PM	Helium valve closed
8/17/2012	7:26:16 PM	BCl3 valve closed
8/17/2012	7:26:16 PM	PH3 valve closed
8/17/2012	7:26:16 PM	SiCl4 pre valve closed
8/17/2012	7:26:16 PM	SiCl4 post valve closed
8/17/2012	7:26:16 PM	Main Vac valve closed
8/17/2012	7:26:16 PM	Bypass valve closed
8/17/2012	7:26:16 PM	H2 valve opened
8/17/2012	7:26:16 PM	Bubbler valve opened
8/17/2012	7:26:16 PM	Helium MFC set to  0.000000
8/17/2012	7:26:16 PM	H2 MFC set to  500.000000
8/17/2012	7:26:16 PM	BCl3 MFC set to  0.000000
8/17/2012	7:26:16 PM	PH3 MFC set to  0.000000
8/17/2012	7:26:16 PM	SiCl4 MFC set to  0.000000
8/17/2012	7:26:16 PM	Bypass solenoid MFC set to  0.000000
8/17/2012	7:26:16 PM	Tube furnace set to 800
8/17/2012	7:29:16 PM	Helium valve closed
8/17/2012	7:29:16 PM	BCl3 valve closed
8/17/2012	7:29:16 PM	PH3 valve closed
8/17/2012	7:29:16 PM	SiCl4 pre valve closed
8/17/2012	7:29:16 PM	SiCl4 post valve closed
8/17/2012	7:29:16 PM	Main Vac valve closed
8/17/2012	7:29:16 PM	Bypass valve closed
8/17/2012	7:29:16 PM	H2 valve opened
8/17/2012	7:29:16 PM	Bubbler valve opened
8/17/2012	7:29:16 PM	Helium MFC set to  0.000000
8/17/2012	7:29:16 PM	H2 MFC set to  500.000000
8/17/2012	7:29:16 PM	BCl3 MFC set to  0.000000
8/17/2012	7:29:16 PM	PH3 MFC set to  0.000000
8/17/2012	7:29:16 PM	SiCl4 MFC set to  0.000000
8/17/2012	7:29:16 PM	Bypass solenoid MFC set to  0.000000
8/17/2012	7:29:16 PM	Tube furnace set to 750
8/17/2012	7:32:16 PM	H2 valve closed
8/17/2012	7:32:16 PM	BCl3 valve closed
8/17/2012	7:32:16 PM	PH3 valve closed
8/17/2012	7:32:16 PM	SiCl4 pre valve closed
8/17/2012	7:32:16 PM	SiCl4 post valve closed
8/17/2012	7:32:16 PM	Main Vac valve closed
8/17/2012	7:32:16 PM	Bypass valve closed
8/17/2012	7:32:16 PM	Helium valve opened
8/17/2012	7:32:16 PM	Bubbler valve opened
8/17/2012	7:32:16 PM	Helium MFC set to  400.000000
8/17/2012	7:32:16 PM	H2 MFC set to  0.000000
8/17/2012	7:32:16 PM	BCl3 MFC set to  0.000000
8/17/2012	7:32:16 PM	PH3 MFC set to  0.000000
8/17/2012	7:32:16 PM	SiCl4 MFC set to  0.000000
8/17/2012	7:32:16 PM	Bypass solenoid MFC set to  0.000000
8/17/2012	7:32:16 PM	Tube furnace set to 0
8/17/2012	7:57:16 PM	Helium valve closed
8/17/2012	7:57:16 PM	H2 valve closed
8/17/2012	7:57:16 PM	BCl3 valve closed
8/17/2012	7:57:16 PM	PH3 valve closed
8/17/2012	7:57:16 PM	SiCl4 pre valve closed
8/17/2012	7:57:16 PM	SiCl4 post valve closed
8/17/2012	7:57:16 PM	Main Vac valve closed
8/17/2012	7:57:16 PM	Bypass valve closed
8/17/2012	7:57:16 PM	Bubbler valve closed
8/17/2012	7:57:16 PM	Helium MFC set to  0.000000
8/17/2012	7:57:16 PM	H2 MFC set to  0.000000
8/17/2012	7:57:16 PM	BCl3 MFC set to  0.000000
8/17/2012	7:57:16 PM	PH3 MFC set to  0.000000
8/17/2012	7:57:16 PM	SiCl4 MFC set to  0.000000
8/17/2012	7:57:16 PM	Bypass solenoid MFC set to  0.000000
8/17/2012	7:57:16 PM	Tube furnace set to 50
8/17/2012	8:02:16 PM	Helium valve closed
8/17/2012	8:02:16 PM	H2 valve closed
8/17/2012	8:02:16 PM	BCl3 valve closed
8/17/2012	8:02:16 PM	PH3 valve closed
8/17/2012	8:02:16 PM	SiCl4 pre valve closed
8/17/2012	8:02:16 PM	SiCl4 post valve closed
8/17/2012	8:02:16 PM	Main Vac valve closed
8/17/2012	8:02:16 PM	Bubbler valve closed
8/17/2012	8:02:16 PM	Bypass valve opened
8/17/2012	8:02:16 PM	Helium MFC set to  0.000000
8/17/2012	8:02:16 PM	H2 MFC set to  0.000000
8/17/2012	8:02:16 PM	BCl3 MFC set to  0.000000
8/17/2012	8:02:16 PM	PH3 MFC set to  0.000000
8/17/2012	8:02:16 PM	SiCl4 MFC set to  0.000000
8/17/2012	8:02:16 PM	Bypass solenoid MFC set to  0.000000
8/17/2012	8:02:17 PM	Tube furnace set to 0
8/17/2012	8:03:14 PM	Helium valve closed
8/17/2012	8:03:14 PM	H2 valve closed
8/17/2012	8:03:14 PM	BCl3 valve closed
8/17/2012	8:03:14 PM	PH3 valve closed
8/17/2012	8:03:14 PM	SiCl4 pre valve closed
8/17/2012	8:03:14 PM	SiCl4 post valve closed
8/17/2012	8:03:14 PM	Bypass valve closed
8/17/2012	8:03:14 PM	Bubbler valve closed
8/17/2012	8:03:14 PM	Main Vac valve opened
8/17/2012	8:03:14 PM	Helium MFC set to  0.000000
8/17/2012	8:03:14 PM	H2 MFC set to  0.000000
8/17/2012	8:03:14 PM	BCl3 MFC set to  0.000000
8/17/2012	8:03:14 PM	PH3 MFC set to  0.000000
8/17/2012	8:03:14 PM	SiCl4 MFC set to  0.000000
8/17/2012	8:03:14 PM	Bypass solenoid MFC set to  0.000000
8/17/2012	8:03:14 PM	Tube furnace set to 0
8/17/2012	8:03:15 PM	Run finished at 8:03 PM
